Alan Zdunek

Research Associate Professor

Office: Room 107 Perlstein Hall
Phone: 312.567.5116
Fax: 312.567.8874
Email: zdunek@iit.edu
Web:

Expertise

Education

B.A. from Knox College (Chemistry, 1982)
M.S. from Illinois Institute of Technology (Chemical Engineering, 1986)
Ph.D. from Illinois Institute of Technology (Chemical Engineering, 1990)

Research

Electrochemical Science and Engineering: Electrochemical impedance spectroscopy, electrodeposition, electrochemistry in semiconductor processes, batteries and fuel cells, bioelectrochemistry.

Corrosion and Material Science: Corrosion measurement and control, material characterization and failure analysis.

Renewable Energy and Sustainability: Hydrogen storage for fuel cell applications, electrically reversible hydrogels.

System Engineering: High-purity fluid delivery and MEMS-based liquid delivery design, online QC monitoring systems.

Current Projects

Awards/Honors

Air Liquide Inventor Recognition Award, 2006
Air Liquide Inventor Recognition Award, 2005
Air Liquide Group Expert Appointment, 2003
Outstanding Project Award, Air Liquide, 1998

Patents

F. Doniat, M. Fisher, A. Zdunek, A. Barajas, I. Suni, X. Chu, A. Tripathi, Y. Li, “Improved Electrolyte Formulaion for Electrochemical Mechanical Planarization”, Taiwan Patent Application, January 2008.
A. Zdunek and A. Barajas, “Electrolyte Composition for Electrochemical Mechanical Polishing Applications”, Patent application, December 13, 2006.
D. Znamensky, A. Zdunek, “Micro Electromechanical Systems (MEMS) For Delivering High Purity Fluids in a Chemical Delivery System”, US7195026 B2, March 27, 2007.
A. Zdunek, “Microstructured Electrode and Method for Monitoring Wafer Electroplating Baths”, US7022212, April 2006.
A. Zdunek, O. Germouni, A. Barajas, “Method and Apparatus for Monitoring, Dosing and Distribution of Chemical Solutions”, Utility Patent Application 20050051433 A1 March 2005.
A. Zdunek, E. Kernerman, W. Korzeniowski, “Corrosion Resistant Gas Cylinder and Gas Delivery System”, US6290088, September 2001, US6263904, July 2001, US6365227, April 2002.
A. Zdunek, P. Vanecek, E. Kernerman, “Apparatus for Measuring Coating Quality”, US6207030 B1, March 2001.
A. Zdunek, E. Kernerman, P. Vanecek, “Method for Measuring Coating Quality”, US6106693 August, 2000, US 5954940, September, 1999.

Books

Selected Publications

H. Chen, S. Parulekar, A. Zdunek, “Investigation of chloride and 3-mercaptopropanesulfonic acid interactions in an acidic copper electroplating bath by electrochemical impedance spectroscopy”, J. Electrochem. Soc., (2008).

H. Chen, S. Parulekar, A. Zdunek, “Investigation of chloride and polyethylene glycol (PEG) interactions in an acidic copper electroplating bath by electrochemical impedance spectroscopy”, J. Electrochem. Soc., (2008).

C. Gabrielli, P. Moçoteguy, H. Perrot, A. Zdunek, D. Nieto Sanz, “Influence of the Anode on the Degradation of the Additives in the Damascene Process for Copper Deposition”, J. Appl. Electrochem. December (2007).

C. Gabrielli, P. Moçoteguy, H. Perrot, A. Zdunek, D. Nieto Sanz, “Investigation of the Ageing of Industrial Deposition Baths for Copper Deposition by the Damascene Process”, J. Electrochem. Soc. 154 (3) (2007).

C. Gabrielli, P. Moçoteguy, H. Perrot, A. Zdunek, D. Nieto Sanz, “A Model for Copper Deposition in the Damascene Process: Application to the Ageing of the Deposition Bath”, J. Electrochem. Soc. 154 D13 (2007).

C. Gabrielli, P. Moçoteguy, H. Perrot, A. Zdunek, D. Nieto Sanz, “Influence of the Anode and the Accelerator on Copper Bath Ageing in the Damascene Process”, J. Electrochem. Soc., 153, (2006)

A. Zdunek, D.N. Sanz, C. Gabrielli, P. Mocoteguy, H. Perrot C. Mace, A. Quennoy, E. Chabal, “Enhanced Copper Bath Monitoring Using Electrochemical Impedance Spectroscopy”, Adv. in Elec. Manufacturing Tech., V-EMT 1:27 (Dec, 2004).

C. Gabrielli, P. Moçoteguy, H. Perrot, A. Zdunek, P. Bouard, M. Haddix, “Electrochemical Impedance Spectroscopy Investigation of Bath Ageing in Damascene Process Chemistries”, Electrochemical and Solid State Letters, 7 (3) C31-C34 (2004).

C. Gabrielli, P. Moçoteguy, H. Perrot, A. Zdunek, P. Bouard, M. Haddix, “Electroacoustic Measurements on Electrodeposited Films Obtained from Copper Damascene Chemistries”, Electrochemical and Solid State Letters, 7 (3) C52-C54 (2004).

Barajas, O. Germouni, D. Nieto Sanz, V. Lelievre, A. Zdunek, “Cu ECD Bath Distribution System with Integrated Advanced Process Control Elements”, CREMSI, December 2004, Fuveau, France.

A. Barajas, A. Zdunek, D. Znamensky, G. DeLuca, C-H Ly, G. Rameau, Y. Campidelli, O. Kermarrec, D. Bensahel, “Status and Optimization of an Electronics Specialty Gas Distribution System Using a Mobile QC Cabinet”, SEMI Technical Symposium: Innovations in Semiconductor Manufacturing, SEMICON West 2002, San Francisco, CA.

A. Zdunek and T. Kimura, “A Corrosion Engineering Perspective to Specialty Gas Distribution Systems”, Proceedings of the Workshop on Gas Distribution Systems, SEMICON West, San Francisco, California, July 1998.